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Achieve near equivalent Marangoni style and vacuum chamber drying capabilities without:
• a high COO
• a large footprint
• demanding facilities requirements
• maintenance intensive components, procedures and downtime
Main features and benefits include:
• Simple installation & operation (no modifications to SRD hardware or programming)
• Eco-friendly (no chemicals)
• Safe (no moving or electrical parts)
• Cost effective (very inexpensive purchase price)
 Retrofitable to any SRD
Controllable vacuum system for reducing the pressure in the process chamber of the SRD during the dry step of the process recipe.
Only facilities requirement is a high pressure ( >80PSI) 3/8” supply line of CDA or N2.
Includes a high integrity check valve for the prevention of exhaust back streaming, particularly when switching from reduced pressure to atmospheric mode.
All input and output connections to the unit terminate with PVC or SS compression fittings. Packaged in a ½” thick white Polypro box with an access door to allow for adjustment of the components and a viewport for the vacuum gauge.
Pump down and backfill cycle purging feature is exclusively available on the Microprocess Technology UP8 and UP12 SRDs |
