Key Process Performance Features

95% Equipment Uptime
- Low Cost of Ownership
- Small Footprints:
    Standard-  32”L-40”W-88”H|
  High Flow- 32”L-56”W-88”H
- Manufacturers’ warranty:
  3 years for defective materials
  and workmanship, and
  1 year on all components

Main Hardware Features

   Designed for combining with 1-3 HF RFEB wet benches,

     but is not exclusive to this process tool and application

   Utilizes membrane contactor technology

   Two models: Standard and High Flow Degas Units

   DI water flow rate capacity & control for 15-90 slm

     (Standard to 50 slm and High Flow to 90 slm)

   Input and output Dissolved O2 (DO) monitoring to

      assess degassing efficiency and degradation

   Prizm touch screen PLC control which can
      interface with process equipment

   Automated insitu-clean feature to maintain optimum

     efficiency and lifetime of the membrane contactors

   Fabricated from white ½” and ¾” Polypro and

     has clear hinged door for viewing and adjusting

     the components