Qualified 200mm and 300mm SRDs which use an UPW rinse and UHP N2 dry

  Provide optimum drying and particle performance following the  HT Lite and HT RFEB processes.

Main Features:

• Avenger UP8 and12 SRDs provide capability for the full range of wafer sizes from 100-300mm
• UP8 option for single and dual stack
• stainless steel cabinetry
• in-line N2 and bowl heaters
• touch screen PLC with multiple recipe capability and process monitoring

  The Avenger UP8 and12 SRDs are manufactured and supported by Microprocess Technologies LLC, an established leader in the spin rinse dryer market.