Avenger SRD packages which use a terabit quality O3/UPW rinse and UHP N2 dry to provide:

  an UHP SiO2 passivated surface following the HT-Lite or HT-RFEB surface treatment process

  sacrificial oxidation for consuming damaged or undesirable Si  (ie plasma etch and ion implant)

  an organics and post-ash photoresist clean

  particle removal 

Main Features:

• Avenger UP8 and 12 SRDs for full range of wafer sizes between 100-300mm
• integrated MKS UHP Ozone/UPW system
• integrated inline UHP water heating unit

The Tera-Zone SRDs are manufactured and supported by Microprocess Technologies LLC, an established leader in the spin rinse dryer market.